![]() ![]() El-Kareh, Fundamentals of Semiconductor Processing Technologies, Kluwer Academic Publishers, Boston, 1995. This process is experimental and the keywords may be updated as the learning algorithm improves.ī. These keywords were added by machine and not by the authors. The second part of the chapter focuses on advanced enabling processes, applicable to structures of nanoscale dimensions Keywords Only a brief review of selected “conventional” unit processes is presented in this chapter. The flow utilizes several unit-process concepts that are described in and the references therein. This will be referred to as the “conventional process.” A conventional BiCMOS process follows, that is applicable to analog/mixed-signal designs. The chapter begins with a description of a typical CMOS logic process flow, applicable to MOSFETs of ˜0.18μm channel length. The test-die typically contains structures that address component parameters and their tolerances, reliability structures, yield structures, process monitors, failure analysis structures, modeling structures, and sub-circuits A complete test die is then designed to be utilized for a full process-flow. Simulations and experiments are run in parallel to ensure the feasibility of a full process flow. These loops can require special test structures that may be part of a full test-die. Experimental short-loops are then run to evaluate individual process modules. Process and device simulators are utilized to optimize the flow and ensure that it will satisfy nominal values for all parameters of the required components. The integration cycle begins with the definition of a full process flow. This includes the definition of a set of required components, component parameters and their tolerances, range of operating temperature, reliability expectations, set of available tools and their limitations at the time of production, and overall cost. Integrating a process on a chip requires a thorough and, throughout the development cycle, continuous understanding of how it will be applied. ![]()
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